The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2002.37
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Temperature dependence of electric resistance of diamond like carbon films with metal
Takanori TAKENO, A. D. Bozhko, Toshiyuki TAKAGI, Toshihiko ABE, Takeshi IMAIZUMI, Takeshi SATO, M. Shupegin
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Keywords: DLC, metal, sensors, electric resistance, temperature dependency
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Pages 70-71

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© 2002 The Japan Society of Mechanical Engineers
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