Grinding Characteristics of Large Scale Optical Elements employing Ultraprecision Mirror Surface Machining System
Kazutoshi Katahira, Yutaka Watanabe, Hitoshi Ohmori, Yutaka Yamagata, Wei min Lin, Sei Moriyasu, Shinya Morita
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Keywords:
ELID Grinding Technique,
Ultraprecision Mirror Surface Machining,
Large Scale Optical Elements,
Submicron Feeding Control
Pages 143-144
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Article 1st page
