Loading Test of AFM Micro-Cantilevers by Using Gas Fluid Force for Evaluating the Spring Constants

The Proceedings of Conference of Tohoku Branch

Online ISSN : 2424-2713

2002

DOI https://doi.org/10.1299/jsmeth.2002.209

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Loading Test of AFM Micro-Cantilevers by Using Gas Fluid Force for Evaluating the Spring Constants

Mikio MURAOKA, Hirokazu OHKUBO

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Keywords: Micro-testing, AFM cantilever, Spring Constant, Gas Fluid Force

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 209-210

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Article 1st page

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© 2002 The Japan Society of Mechanical Engineers

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