Development of On-machine Observation-Profile Measuring System with AFM and its Properties
Yutaka WATANABE, Sei MORIYASU, Kazutoshi KATAHIRA, Wei min LIN, Hitoshi OHMORI, Hideo TASHIRO, Akitake MAKINOUCHI
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Keywords:
Ultra-precision Machining,
On-Machine Measurement,
Atomic Force Microscope,
Shape,
Surface Roughness
Pages 221-222
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Article 1st page
