Difference in the Ultimate Pressure of the Dry-Scroll Vacuum Pump with the Species of Gases

The Proceedings of Conference of Tohoku Branch

Online ISSN : 2424-2713

2002

DOI https://doi.org/10.1299/jsmeth.2002.95

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Difference in the Ultimate Pressure of the Dry-Scroll Vacuum Pump with the Species of Gases

Shin Kamada, Tadashi Sawada, Wataru Sugiyama, Masuhisa Yabuki, Manabu Fujioka, Masaru Tuchiya

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Keywords: Scroll Vacuum Pump, Ultimate Pressure, Species of Gases, Adiabatic Compression, Change in Clearance

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Pages 95-96

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© 2002 The Japan Society of Mechanical Engineers

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