157 Study on A Piezoelectric Micro Pump with High Performance Check Valve

The Proceedings of Conference of Tohoku Branch

Online ISSN : 2424-2713

2008.43

Session ID : 157

DOI https://doi.org/10.1299/jsmeth.2008.43.115

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157 Study on A Piezoelectric Micro Pump with High Performance Check Valve

Zunqiang FAN, Katsuyoshi SUZUKI, Hideharu ISAKA, Kennichi SUZUKI, Zhigang YANG

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Keywords: Piezoelectric pump, Piezoelectric vibrator, Metal check valve, Vibration

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© 2008 The Japan Society of Mechanical Engineers

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