The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2011.46
Session ID : 134
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134 On-machine measurement of micro-structured surface by an air-bearing displacement sensor
Kang-Won LEE, Wei GAO
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Keywords: Air-bearing, Linear encoder, Measurement, Micro-structure, Micro-lens, Stylus
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© 2011 The Japan Society of Mechanical Engineers
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