The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2012.47
Session ID : 195
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195 Design and experimental validation of an XY micro-stage
Yuxin Peng, Yuki Shimizu, So Ito, Wei Gao
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Keywords: XY micro-stage, precision positioning, PZT, friction drive
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© 2012 The Japan Society of Mechanical Engineers
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