The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2013.48
Session ID : 161
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161 Fabrication of thin-film thermal contact sensor for detection of surface defects
Wenjian LU, Yuta OHBA, Yuki SHIMIZU, Wei GAO
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Keywords: Wafer inspection, Frictional heat, Lithography process, Contact sensor
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© 2013 The Japan Society of Mechanical Engineers
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