The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2014.49
Session ID : 175
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175 Fabrication of scale grating by using a two-axis Lloyd's mirror interferometer
Xinghui LI, Yuki SHIMIZU, So ITO, Wei GAO
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Keywords: Grating, Laser interference lithography, Measurement, Surface encoder
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© 2014 The Japan Society of Mechanical Engineers
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