The Proceedings of Conference of Tohoku Branch
Online ISSN : 2424-2713
2014.49
Session ID : 101
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101 Crystallinity of Electroplated Copper Thin Film Interconnections and Their Local Joule Heating
Pornvitoo Rittinon, Ken Suzuki, Hideo Miura
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Keywords: Reliabolity, Thin films, Joule heating, Grain boundary, Electroplated copper
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© 2014 The Japan Society of Mechanical Engineers
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