178 A Trial of Fabricating Micro Material Utilizing Controlled Stress Migration in a Passivated Metallic Film

Hsin-Tzu Lee; Masumi Saka

doi:10.1299/jsmeth.2016.51.153

The Proceedings of Conference of Tohoku Branch

Online ISSN : 2424-2713

2016.51

Session ID : 178

DOI https://doi.org/10.1299/jsmeth.2016.51.153

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178 A Trial of Fabricating Micro Material Utilizing Controlled Stress Migration in a Passivated Metallic Film

Hsin-Tzu Lee, Masumi Saka

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Keywords: Micro-material, Passivated film, Preferred diffusion pathway, Stress control, Stress migration

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Abstract

In the present work, a technique of fabricating micro-material with a ring shape in a passivated metallic film is proposed by utilizing controlled stress migration (SM). By applying an artificial hole filled with ductile material, a ring-shaped micro-material was formed, which indicates the effectiveness of the present technique.

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