The Proceedings of Autumn Conference of Tohoku Branch
Online ISSN : 2424-2721
2017.53
Session ID : 212
Conference information

Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : September 30, 2017

Characteristics of micro scanning mirror with acoustic cavities
*Takuya Kanesawa, *Takashi Sasaki, *Kazuhiro Hane
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Keywords: Micro scanning mirror, MEMS scanner, acoustic wave, acoustic cavity, acoustic radiation, structure-wave interaction system
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© 2017 The Japan Society of Mechanical Engineers
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