The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2000.49
Session ID : 433
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433 Phase change of boron nitride thin films under preparation condition of r. f. sputtering.
Masato Kato, Takaya Hasegawa, Seiji Hayasi, Sigeo Kotake, Yasuyuki Suzuki, Masahumi Senoo
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Keywords: sputtering, boron target, boron nitride, cBN, hBN
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© 2000 The Japan Society of Mechanical Engineers
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