The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2000.49
Session ID : 435
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435 Exfoliation Behavior of Heated H^+ Implanted Silicon
Hiroyuki IWATA, Makoto TAKAGI, Yutaka TOKUDA, Toru IMURA
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Keywords: Hydrogen Implantation, Exfoliation, SOI, Platelet, Silicon
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© 2000 The Japan Society of Mechanical Engineers
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