Abstract
In this paper, in order to realize large displacement micro-stages, we propose a serially-arranged, electrostatic comb-drive XY-stage. We discuss the design and fabrication process of a metal sputtered PMMA micro-actuators. The micro XY-stage, which was fabricated by this research, was made with the LJGA fabrication process. It has serially arranged electrostatic comb-drive actuators. The designed single unit size of the XY-stage, including electrodes, is about 5 mm square, 100 μm range in the horizontal direction is serially arranged, while the vertical direction is 50 μm range with a single comb set. The movable range was determined theoretically and experimentally.
