The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2001.50
Session ID : 401
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401 Synthesis and Mechanical properties of Boron Oxide thin-films
Ryutaro Watanabe, Akihito Matsumuro, Hidenobu Ohta
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Keywords: Boron Oxide, thin film, Ion beam-Assisted Deposition
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© 2001 The Japan Society of Mechanical Engineers
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