405 Effect of N ion irradiation on microstructure of C-N thin films

The Proceedings of Conference of Tokai Branch

Online ISSN : 2424-2748

2001.50

Session ID : 405

DOI https://doi.org/10.1299/jsmetokai.2001.50.189

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405 Effect of N ion irradiation on microstructure of C-N thin films

Hidenobu OHTA, Akihito MATSUMURO, Yutaka TAKAHASHI

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Keywords: carbon nitride, microstructure, ion-beam-assisted deposition

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© 2001 The Japan Society of Mechanical Engineers

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