The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2001.50
Session ID : 433
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433 Dynamic Surface Observation of Thin Film under Tensile Stress by AFM
Kimiharu Kayukawa, Akihito Matsumuro, Kazuo SATOH
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Keywords: Tensile Stress, Atomic Force Microscope, Thin Film
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© 2001 The Japan Society of Mechanical Engineers
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