The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2002.51
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The influence of the lattice parameter of various substrates for boron nitride phases by reactive radio frequency sputtering
Takaya HASEGAWA, Shigeo KOTAKE, Yasuyuki SUZUKI
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Keywords: Boron nitride, Sputtering, Substrate, Lattice parameter
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Pages 209-210

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© 2002 The Japan Society of Mechanical Engineers
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