Mechanical properties of C-N thin film on Diamond substrate

The Proceedings of Conference of Tokai Branch

Online ISSN : 2424-2748

2002.51

DOI https://doi.org/10.1299/jsmetokai.2002.51.213

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Mechanical properties of C-N thin film on Diamond substrate

Akihisa Mori, Akihito Matsumuro, Hidenobu Ohta

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Keywords: Carbon Nitride, Diamond Substrate, Ion beam-Assisted Deposition

CONFERENCE PROCEEDINGS FREE ACCESS

Pages 213-214

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© 2002 The Japan Society of Mechanical Engineers

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