The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2002.51
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Nanometer Scale Processing of Thin Films with a Carbon Nanotube Tip
Yohei FUJIMOTO, Tomohiko SUGIYAMA, Akihito MATSUMURO
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Keywords: Nano processing, Carbon nanotube, Thin film
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 239-240

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© 2002 The Japan Society of Mechanical Engineers
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