The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2006.55
Session ID : 226
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226 Study on Control of Reaction Process under Thermal Nonequilibrium Conditions Using RF Discharge Plasma
Yoshio TANAHASHI, Kazuhiro ISHIMARU
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Keywords: Nonequilibrium Plasma, RF Discharge, Pulse Modulated Mode, Carbon Materials, CVD
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© 2006 The Japan Society of Mechanical Engineers
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