The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2008.57
Session ID : 253
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253 Fluorine-containing DLC coating without supplying source gas by pulsed-plasma ablation of PTFE
Eri HAMAJIMA, Hiroyuki KOIZUMI, Hiroyuki KOUSAKA, Yoshihiro ARAKAWA, Noritsugu UMEHARA
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Keywords: fluorine, diamond-like carbon, pulsed-plasma ablation, polytetrafluoroethylene
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© 2008 The Japan Society of Mechanical Engineers
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