The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2008.57
Session ID : 655
Conference information
655 Elimination of micro corrugation by alkali solutions
Noriyuki INAGAKI, Hikaru SASAKI, Mitsuhiro SHIKIDA, Kazuo SATO
Author information
Keywords: DRIE (Deep Reactive Ion Etching), Micro Corrugation, Anisotropic Wet Etching
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (391K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2008 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Share this page
feedback
 Top