The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2009.58
Session ID : 355
Conference information
355 Effect of electromagnetic wave frequency on plasma generation inside narrow metal tube by MVP method
S. Kadowaki, H. Kousaka, N. Umehara, A. Kondo, N. Tamura, T. Shindo, S. Moriya, K. Nakao
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Keywords: high density plasma, microwave, ion sheath, inner surface, nallow metal tube
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© 2009 The Japan Society of Mechanical Engineers
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