The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2009.58
Session ID : 369
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369 Development of a GaAs Probe Used by Microwave AFM
Akifumi FUJIMOTO, Atsushi HOSOI, Yang JU
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Keywords: Microwave, Atomic force microscope, probe, Gallium Arsenide
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© 2009 The Japan Society of Mechanical Engineers
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