The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2009.58
Session ID : 470
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470 Research on a Non-contact Handling System using Swirling Flow : Flow Behavior in a Vortex Cup
Masako UMEBACHI, Shouichiro IIO, Xin LI, Toshiharu KAGAWA, Toshihiko IKEDA
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Keywords: Swirling Flow, Non-contact Handling, Wafer, PIV, Pressure Measurement
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© 2009 The Japan Society of Mechanical Engineers
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