The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2009.58
Session ID : 701
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701 Conditions for CVD Synthesis of Carbon Materials by Thermal Nonequilibrium Plasma Using RF Discharge Control
Tomoyuki KAMIMURA, Kazuhiro ISHIMARU
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Keywords: Nonequilibrium Plasma, RF Discharge, Pulse Modulated Mode, He Mixture, Carbon Materials, CVD
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© 2009 The Japan Society of Mechanical Engineers
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