The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2015.64
Session ID : 273
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273 Hydrophilic treatment of DLC films in N_2 plasma using Electron beam exited plasma device
Kenji HIRATA, Petros ABRAHA
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Keywords: DLC, Electron Beam Excited Plasma(EBEP), N_2 plasma, Hydrophilic treatment
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© 2015 The Japan Society of Mechanical Engineers
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