The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2015.64
Session ID : 281
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281 Uniform polishing of aspheric Si lens
Mutsumi OKADA, Hirofumi SUZUKI, Akihiro TAKAGI
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Keywords: uniform polishing, aspheric lens, surface roughness, silicon lens
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© 2015 The Japan Society of Mechanical Engineers
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