The Proceedings of Conference of Tokai Branch
Online ISSN : 2424-2748
2016.65
Session ID : 105
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105 Hydrogen injection to silicon and its effect on mechanical properties of silicon
Taehoon KIM, Masaru NAKAMURA, Hayato IZUMI, Shoji KAMIYA
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Keywords: Single crystal silicon, Hydrogen, Nano indentation, Boiling process
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© 2016 The Japan Society of Mechanical Engineers
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