The Proceedings of Yamanashi District Conference
Online ISSN : 2424-2705
2005
Session ID : 461
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461 Temperature distribution and influence on micro-processing of ceramics by eximer laser
Keita NAKAGAKI, Rie HIGUCHI, Yoshinori KANNO
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Keywords: Exmer laser, micro-processing
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© 2005 The Japan Society of Mechanical Engineers
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