The Proceedings of Yamanashi District Conference
Online ISSN : 2424-2705
2005
Session ID : 754
Conference information
754 Proposition of a multi-DOFs fluid microactuator using thin film metallic glass
Kazuhiro YOSHIDA, Nobutaka HORII, Seiichi HATA, Shinichi YOKOTA, Akira SHIMOKOHBE
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Keywords: Microactuator, Thin film metallic glass, Diaphragm, Multi-DOFs, Fluid power system
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© 2005 The Japan Society of Mechanical Engineers
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