The Proceedings of Yamanashi District Conference
Online ISSN : 2424-2705
2013
Session ID : 159
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159 A Multi-DOF Microactuator System Using High Frequency Alternating Pressure Source
Kazuhiro YOSHIDA, Satoshi YAMAMOTO, Sabg In EOM, Shinichi YOKOTA
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Keywords: Microactuator, Piezoelectric element, Piezoelectric valve, Multi-DOF, Alternating-pressure
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© 2013 The Japan Society of Mechanical Engineers
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