307 Mirror Polishing of Silicon Wafer based on the Development of Bamboo Charcoal Tool

The Proceedings of Yamanashi District Conference

Online ISSN : 2424-2705

2014

Session ID : 307

DOI https://doi.org/10.1299/jsmeyamanashi.2014.63

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307 Mirror Polishing of Silicon Wafer based on the Development of Bamboo Charcoal Tool

Yousuke NAKAMURA, Terunobu KUJI, Abdul Rahim YUZAIRI, Shinsaku HAGIWARA

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Keywords: Charcoal polisher, surface roughness, Silicon wafer, Polishing tool, natural resources

CONFERENCE PROCEEDINGS FREE ACCESS

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© 2014 The Japan Society of Mechanical Engineers

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