Abstract
Acoustic emission signals were observed when solid target of aluminum alloy, cupper alloy, alumina, fused silica and LiF single crystal were irradiated with fast Ar ions. The projectile beam of 95Me V/u Ar ions was chopped to a pulse shorter than 1 μs. The high sensitive piezoelectric sensors detected the acoustic emission beyond the samples and the irradiated depth could be calculated using onset of acoustic emission and longitudinal wave velocity. The energy of acoustic emission was proportional to the energy of irradiated Ar ions.