Proceedings of the 1992 Annual Meeting of JSME/MMD
Online ISSN : 2433-1287
2001
Session ID : 320
Conference information
320 Effect of Delamination Strength on Wear Property of SiC Film Deposited by Helicon Sputtering Method
Masahiko Kato, Xu Yan, Keijiro Nakasa
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (446K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 2001 The Japan Society of Mechanical Engineers
Previous article Next article
Favorites & Alerts

Recently viewed articles
Announcements from publisher
Successor

The Proceedings of the Materials and Mechanics Conference

Share this page
feedback
 Top