Proceedings of the 1992 Annual Meeting of JSME/MMD
Online ISSN : 2433-1287
2006
Session ID : W2
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W2 Progress in optical MEMS development and the necessity of material strength evaluation
Kazuhiro Hane
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Keywords: Optical MEMS, Strength of materials, Silicon, Micro-mirror, Grating
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© 2006 The Japan Society of Mechanical Engineers
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