Proceedings of the 1992 Annual Meeting of JSME/MMD
Online ISSN : 2433-1287
2006
Session ID : P12
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P12 Effect of Residual Stress in Thin Films on Transmission Characteristics of a Laser Beam Through an Thin-Film Optical Wave-Guide
Atsushi KITAMURA, Ken Suzuki, Hideo MIURA
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Keywords: Residual Stress, Finite Element Method, Reliability, Thin Film, Optical wave-guide
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© 2006 The Japan Society of Mechanical Engineers
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