Journal of the Society of Materials Science, Japan
Online ISSN : 1880-7488
Print ISSN : 0514-5163
ISSN-L : 0514-5163
Review
International Standardization of Micro-Materials Evaluation Methods for MEMS Devices
Yakichi HIGO
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Keywords: International Standardization, MEMS, Micro materials, IEC, Micro machine Centre
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2009 Volume 58 Issue 10 Pages 804-807

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© 2009 by The Society of Materials Science, Japan
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