Journal of the Society of Materials Science, Japan
Online ISSN : 1880-7488
Print ISSN : 0514-5163
ISSN-L : 0514-5163
Lecture
Electronic Materials Accelerating the Development of Ubiquitous Devices
IV: High Performance Piezoelectric Thin Films for MEMS Applications
Takeshi YOSHIMUA
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Keywords: Piezoelectric films, MEMS, ferroelectric, Domain
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2023 Volume 72 Issue 11 Pages 836-842

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