Journal of the Society of Materials Science, Japan
Online ISSN : 1880-7488
Print ISSN : 0514-5163
ISSN-L : 0514-5163
Technical Topic
Development of MEMS Hydrogel Friction Tester for In-Situ SEM at the Nanoscale
Tadashi ISHIDA
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Keywords: MEMS, Agar, Lubrication, Electron transparent membrane, Soft cantilever, Microchannel, In Situ SEM
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2024 Volume 73 Issue 9 Pages 713-717

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