Journal of the Society of Materials Science, Japan
Online ISSN : 1880-7488
Print ISSN : 0514-5163
ISSN-L : 0514-5163
PENETRATION DEPTH OF X-RAYS FOR STRESS MEASUREMENT OF SILICON NITRIDE
Kenji SUZUKIKeisuke TANAKA
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1995 Volume 44 Issue 501Appendix Pages 134-135

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