Abstract
The fabrication and processing of an actuator with a TiNi shape memory alloy (SMA) film are discussed and demonstrated. TiNi SMA films were deposited by using sputter deposition techniques, patterned and etched. These films were solution-treated and aging-treated, and then an inverse force layer of chromium was deposited on a SMA film. The frequency response of beam type actuator was measured by the resistance heating. The maximum amplitude was in proportion to inverse force, and was therefore controlled by chromium thickness. The maximum displacement decreased sligtly with an increase of frequency. The minimum displacement suddenly increased at more than 0.1Hz and was constant above 1Hz. The characteristic of the frequency response of the actuator was not decided by chromium thickness but TiNi thickness, because thickness of the latter was fifteen to forty times larger than that of the former. Because the frequency response depended on the heat radiation of an actuator, TiNi thickness was the most important factor to the actuation.
