マイクロマテリアル 3. マイクロエレメント加工法

浅野 種正

doi:10.2472/jsms.47.208

Micromaterials

III: Microelemtent Fabrication Technology

Tanemasa ASANO

Author information

Keywords: Micromaterial, Microfabrication, Micromachining, LIGA, Fast atom beam, Anodization, Beam induced process

JOURNAL FREE ACCESS

1998 Volume 47 Issue 2 Pages 208-214

DOI https://doi.org/10.2472/jsms.47.208

Details

Published: February 15, 1998 Received: June 10, 1997 Available on J-STAGE: June 03, 2009 Accepted: June 10, 1997 Advance online publication: - Revised: -
Correction information
Date of correction: June 03, 2009 Reason for correction: - Correction: DTRECEIVED Details: Right : 19970610

Date of correction: June 03, 2009 Reason for correction: - Correction: TITLE Details: Wrong : Lecture
Right : Micromaterials

Date of correction: June 03, 2009 Reason for correction: - Correction: SUBTITLE Details: Right : III: Microelemtent Fabrication Technology

Date of correction: June 03, 2009 Reason for correction: - Correction: AUTHOR Details: Right : Tanemasa ASANO¹⁾

Date of correction: June 03, 2009 Reason for correction: - Correction: AFFILIATION Details: Right :
1) Center for Microelectronic Syst., Kyushu Inst. of Tech.

Date of correction: June 03, 2009 Reason for correction: - Correction: KEYWORD Details: Right : Micromaterial, Microfabrication, Micromachining, LIGA, Fast atom beam, Anodization, Beam induced process

Date of correction: June 03, 2009 Reason for correction: - Correction: CITATION Details: Right : 2) S. M. Sze, ed., “Semiconductor Sensors” (1994) John Wiley & Sons, Inc..
4) T. Asano and J. Yasuda, Jpn. J. Appl. Phys., 35, 6632 (1996).
5) T. Asano, Y. Oobuchi and S. Katsumata, J. Vac. Sci. Technol., B13, 431 (1995).
6) Y. Okada, K. Makihira and T. Asano, unpublished.
7) K. Higa and T. Asano, Jpn. J. Appl. Phys., 35, 6648 (1996).
9) H. Morimoto, M. Yamashita, T. Kishimoto, M. Takai, S. Yura, A. Hosono, S. Okuda, S. Lipp, L. Frey and H. Ryssel, Digest of Papers, The 9th Int. Microprocess Conf., p. 248 (1996).
11) T. Suga, T. R. Chung, L. Yang, N. Hosoda and H. Takagi, Ext. Abs. 1996 Int. Conf. Solid State Devices and Materials, p. 461 (1996).

Corresponding author

Correction information

Register with J-STAGE for free!