Abstract
In glass disk polishing, fatty acid salts are added to Ceria Polishing Slurry for the purpose of the cost cut and the improvement in processing accuracy. A polishing performance improves by optimizing the concentration and the kind of fatty acid salts. A certain kind of fatty acid salts acts as interspace material of Ceria Polishing Slurry. In this paper, Interspace Material Polishing Slurry: ISM Slurry is proposed and the polishing performances are investigated. ISM Slurry raises a polishing performance sharply. Especially, a polishing rate improves about 50%, minute sinuosity is reduced about 40%, and the adhesion amount of resources of the glass disk surface is reduced to about 1/5. It realizes that ISM Slurry cuts cost in glass disk polishing, and makes accuracy high.
