Journal of the Japan Society for Precision Engineering, Contributed Papers
Online ISSN : 1881-8722
Print ISSN : 1348-8724
ISSN-L : 1348-8716
Paper
Proposal of a New Fluid Bearing Utilizing Traveling Waves
Eiji SHAMOTONorikazu SUZUKIHirotoshi UEDARei HINO
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2006 Volume 72 Issue 12 Pages 1483-1488

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Abstract

A new non-contact fluid bearing, which utilizes traveling waves, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the waves traveling radially on the bearing surface. Conventional hydrostatic bearings utilize externally compressed fluid, which requires plumbing and large facilities. The proposed bearing realizes non-contact precision motion without those facilities, and furthermore it has a capability to electrically control the bearing force or clearance. A prototype air bearing was developed on the basis of the proposed principle by utilizing piezo-electric actuators. Its non-contact smooth motion was confirmed, and its basic performance is clarified experimentally in terms of stiffness, bearing clearance, load capacity, pressure distribution of the air film, etc.

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© 2006 The Japan Society for Precision Engineering
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