Journal of the Japan Society for Precision Engineering, Contributed Papers
Online ISSN : 1881-8722
Print ISSN : 1348-8724
ISSN-L : 1348-8716
Paper
Analysis of Formation Mechanism of Microspike-Arrays on Tungsten Surface by Femtosecond Laser Irradiation
Yasumitsu NOMURAEtsuji OHMURATomokazu SANOHiroyuki HAYASHIYoshinori HIRATA
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2006 Volume 72 Issue 5 Pages 668-673

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Abstract
Microspike-arrays are formed on a tungsten surface by irradiating femtosecond laser through a mask aperture in the air. Formation mechanism of such microspike-arrays was discussed with analysis of laser light diffraction. Intensity distribution diffracted through a mask aperture was calculated by using the Fresnel-Kirchhoff integral formula, not the Fresnel diffraction formula, because the distance between a mask aperture and a tungsten surface is almost as short as the size of a mask aperture. Assuming that the ablation rate depends on the diffracted intensity, ablation process by repetitive irradiation was analyzed. Estimated ablation results were consistent with the experimental results. Microspike-arrays have potential in application for such as emission cathodes in a Field Emission Display (FED).
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© 2006 The Japan Society for Precision Engineering
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