Abstract
A method for calculating airflow damping of rectangular microoscillator using the analytical solution of the cylindrical beam, called cylinder model, is proposed. In order to verify the effectiveness of the analysis, theoretical values of the airflow damping calculated by the method was compared with the numerical solutions obtained by a commercially available fluid analysis software. The results showed that the values of the airflow damping calculated by the cylinder model was close to the numerical value for the rectangular beam over the wide range of Ω (Reynolds number for vibrating fluid). Moreover, comparing to experimental values presented in a past research, it was shown that the calculated values by the cylinder model was closer to the measured value than those by the bead-model, sphere-model and Sader's model. From the above results, it was confirmed that proposed method was validated for calculating airflow damping of the rectangular microoscillator.
